140CPU11303
140CPU11303步进电机的输出力矩随转速升高而下降，且在较高转速时会急剧下降，所以其高工作转速一般在300～600RPM。交流伺服电机为恒力矩输出，即在其额定转速（一般为2000RPM或3000RPM）以内，都能输出额定转矩，在额定转速以上为恒功率输出。
步进电机一般不具有过载能力。交流伺服电机具有较强的过载能力。以三洋交流伺服系统为例，它具有速度过载和转矩过载能力。其大转矩为额定转矩的二到三倍，可用于克服惯性负载在启动瞬间的惯性力矩。步进电机因为没有这种过载能力，在选型时为了克服这种惯性力矩，往往需要选取较大转矩的电机，而机器在正常工作期间又不需要那么大的转矩，便出现了力矩浪费的现象。
步进电机的控制为开环控制，启动频率过高或负载过大易出现丢步或堵转的现象，停止时转速过高易出现过冲的现象，所以为保证其控制精度，应处理好升、降速问题。交流伺服驱动系统为闭环控制，驱动器可直接对电机编码器反馈信号进行采样，内部构成位置环和速度环，一般不会出现步进电机的丢步或过冲的现象，控制性能更为可靠。
KLA-Tencor Retrofit Optics Beamsplitter 0099602-001
KLA-Tencor SLX Objective Lens 760-334096-000 Untested
KLA-Tencor 395005 Tropel 14X CYL Telescope-1 AIT2
KLA-Tencor AIT UV COLL Side Polarizer 0024476-001
KLA-Tencor Lower Octopole/Wein Lens 780-14108-000
KLA-Tencor Lower Octopole/Wein Lens 780-14108-000
KLA-Tencor Cannon Box Magazine Assembly 740-060658-001
KLA Tencor 710-711754-00 Autofocus Board
KLA Tencor 710-711567-00 Communication interface II
KLA Tencor X/Y Interface 710-720011-01 Rev B6
KLA Tencor Sensor Buffer Board 710-710199-01
KLA Tencor Illumination Control 710-713250-01
KLA Tencor Cassette Controller Board 710-711879-01
KLA-Tencor SM300 (SpectraMap) Thin Film Mapping Tool
KLA-Tencor Wafer APS3 board AIT3 assy 546801 Rev: AC
COMDEL CPS SERIES RF GENERATOR KLA TENCOR POWER SUPPLY
Sony KLA-Tencor AIT 1 PowerHAD Camera DXC-950 CMA-D2
KLA TENCOR XYI ASSY 710-610391-000/AB SN P841002056 REV
KLA-Tencor AIT APS Tower/Center Block 0071149-001 Used
KLA-Tencor AIT3XP APS NIC Tower 0034693-001
KLA Tencor MMD analog AIT UV 0021488-005 Rev. AA
KLA Tencor MMD analog AIT UV 0052196-007
KLA Tencor MMD analog AIT UV 0021488-004 Rev AA
KLA-Tencor Lower Octopole/Wein Lens 780-14108-000 Used
KLA-Tencor Lower Octopole/Wein Lens 780-14108-000 Used
KLA-Tencor AIT 2 GPIO Board 386065 working
KLA-Tencor Lid Lift Leg Assy. 781-11759-000 working
KLA-Tencor CIP XP Column Extension Assy. 0110157-000
KLA-Tencor 486i Controller 0020839 Rev.AA working
KLA-Tencor High Voltage Control Module 52-1081
KLA-Tencor CRS2000 Olympus Microscope Turret BH3-5NRE-M
KLA-Tencor AIT 2 PSF Driver Board 556661 working
KLA-Tencor AIT 2 4-Channel Motor Control Board 363251
KLA-Tencor AIT 2 4-Channel Motor Control 261408 working
KLA-Tencor AIT 2 U500 Control Board 690D1470 working
KLA-Tencor Quantox High Voltage Control Module 52-1081
KLA-Tencor 8100 200mm XY Stage 780-10480-001 working
KLA-Tencor CRS1010 Camera Lens Filter 002001
KLA-Tencor CRS1010 Lens Filter Assy. 000056 working
KLA-Tencor 710-663106-001 Dual Stepper Driver 2
KLA-Tencor EDrawer Hardware RETR Kit 5.2 STD 2139
KLA-Tencor 2139 Flipper Autoloader Kit 780-689642-000
KLA-Tencor AIT2 Power Assembly LPM 390500
KLA-Tencor CRS1010 Camera Filter Assy. 000056 working
KLA-Tencor CRS1010 Lens Filter Assy. 002001 working
KLA-Tencor Glentek Electronics Analyzer 0045454-000
KLA-Tencor SLX RF Bench Assy. 740-336864-001 untested
KLA-Tencor Rotary Transfer Arm 720-07360-000
KLA-Tencor XP Objective Lens 0110155-000 Untested
KLA-Tencor port AIT3 Mask Changer 556190
KLA-Tencor Laser Mod 0124593-000
KLA-Tencor AIT UV Laser Servo Detector 0099586-001
KLA Tencor 710-710112-01 Mechanical Drive Board
KLA Tencor 710-710112-00 Mechanical Drive Board
KLA Tencor 710-710112-01 Mechanical Drive Board
KLA Tencor 710-710112-00 Mechanical Drive Board
KLA Tencor PN: 770-809195-000 Image Processor Board
KLA-Tencor GPIO assy: 0052412-001 Rev: AA
KLA Tencor robot DISTR AIT2 530352 P/N 0035531-000
KLA TENCOR FELL PROBE HEAD TYPE C 50-0002-03
KLA-Tencor Upper Housing Assy. 781-21332-000 working
KLA-Tencor Sony DXC-950P PowerHAD 3CCD Video Camera
KLA - Tencor GPIO ASSY Board 0052412-001 REV.AB
KLA-Tencor 395056 Tropel 2X mag conv lens
KLA Tencor P/N 770-809195-000
KLA-Tencor port NNC, AIT3, XP Polarizer 0044232-001
KLA-Tencor AIT 2 Illumination Board 556700 working
Sony KLA-Tencor AIT 2 PowerHAD Camera DXC-950 363170
KLA-Tencor Slide 12V Power Supply 740-658138-00 working
KLA-Tencor Quantox Head Control Module 64020 working
KLA-Tencor AIT 2 Servo Box Assy. 0039978-000 working
KLA-Tencor 740-693218-001 Extron ADA 4 300MX HV 2139
KLA-Tencor AIT1 Tropel 14X Anamorphic Telescope
KLA-Tencor AIT1 Ultrapointe Fast Z Controller PCB
KLA-Tencor SLX Chirp Cell 760-333918-000
KLA-Tencor 10KV Floodgun Assembly 720-23189-000
KLA-Tencor Spring Clamp Laser Servo Detect. 0124592-000
KLA-Tencor AIT/UV Laser Servo Detector 0099572-000
KLA-Tencor SLX Dog/Wag Assembly 760-333026-001
KLA-Tencor Left Cassette Nest, 5.2 740-694842-000
KLA - Tencor optics assembly 2xxx 0024939-000 Y-Mirror
KLA-Tencor PCB ASSY , INTF-DIAG , ES32
KLA-Tencor AIT 2 VAS Buffer Assy. 0034223-000 working
KLA-Tencor Aperture Heated Rod 781-23234-002 Used
KLA-Tencor Aperture Heated Rod 781-23234-001 Used
KLA-Tencor 3XX-I Reflected Light Detector760-321399-000
KLA-Tencor Laser Servo Detector 0062032-000 Refurbished
KLA-Tencor AMS Assembly 720-4800036-002 Used
KLA-Tencor X-Scanner Assembly 760-032324-00
KLA Tencor PSF driver 0031663-000
KLA-Tencor RS100 Equipe Robot End Effector working
KLA-Tencor 64060 Distribution Module working
KLA-Tencor 301 I-Line RF Bench 740-323100-002 untested
KLA-Tencor SLX Telescope Turret 740-333024-001 untested
KLA-Tencor Quantox Distribution Module 64060 working
KLA-Tencor Optics RF Bench Assy. 740-058089-00 untested
KLA-Tencor 0092173-001 Hamamtsu L9519-01 D2 HB Lamp
KLA-Tencor AIT Laser Servo Detector Assy. 0099586-000