ci801kit
ci801kit
两相混合式步进电机步距角一般为 1.8°、0.9°，五相混合式步进电机步距角一般为0.72 °、0.36°。也有一些的步进电机通过细分后步距角更小。如三洋公司（SANYO DENKI）生产的二相混合式步进电机其步距角可通过拨码开关设置为1.8°、0.9°、0.72°、0.36°、0.18°、0.09°、0.072°、0.036°，兼容了两相和五相混合式步进电机的步距角。
交流伺服电机的控制精度由电机轴后端的旋转编码器保证。以三洋全数字式交流伺服电机为例，对于带标准2000线编码器的电机而言，由于驱动器内部采用了四倍频技术，其脉冲当量为360°/8000=0.045°。对于带17位编码器的电机而言，驱动器每接收131072个脉冲电机转一圈，即其脉冲当量为360°/131072=0.0027466°，是步距角为1.8°的步进电机的脉冲当量的1/655。
步进电机在低速时易出现低频振动现象。振动频率与负载情况和驱动器性能有关，一般认为振动频率为电机空载起跳频率的一半。这种由步进电机的工作原理所决定的低频振动现象对于机器的正常运转非常不利。当步进电机工作在低速时，一般应采用阻尼技术来克服低频振动现象，比如在电机上加阻尼器，或驱动器上采用细分技术等。
交流伺服电机运转非常平稳，即使在低速时也不会出现振动现象。交流伺服系统具有共振抑制功能，可涵盖机械的刚性不足，并且系统内部具有频率解析机能（FFT），可检测出机械的共振点，便于系统调整。
KLA-Tencor AMS Assembly 720-4800036-002 Used
KLA-Tencor X-Scanner Assembly 760-032324-00
KLA Tencor PSF driver 0031663-000
KLA-Tencor RS100 Equipe Robot End Effector working
KLA-Tencor 64060 Distribution Module working
KLA-Tencor 301 I-Line RF Bench 740-323100-002 untested
KLA-Tencor SLX Telescope Turret 740-333024-001 untested
KLA-Tencor Quantox Distribution Module 64060 working
KLA-Tencor Optics RF Bench Assy. 740-058089-00 untested
KLA-Tencor 0092173-001 Hamamtsu L9519-01 D2 HB Lamp
KLA-Tencor AIT Laser Servo Detector Assy. 0099586-000
KLA-Tencor AIT 2 Tropel Lens Assy. 142851 working
KLA-Tencor 710-680279-00 Optics Interface Board
KLA-Tencor AIT1 Tropel 11.25X Anamorphic Telescope
KLA-Tencor AIT2 UI Splitter Board 547247 Working
KLA-Tencor 285293 386065 AIT2 GPIO Board Working
KLA-Tencor AIT2 XP Datapackage Board 0048805-002
KLA-Tencor AIT2 4-Channel PWM Motor Drive Board 188859
KLA-Tencor AIT1 Ultrapointe Page Scanner Controller PCB
KLA-Tencor SLX Relay/M5 Assembly 760-333019-001 Used
KLA-Tencor 5300 AMS Assy 720-480036-002 Used, Untested
KLA-Tencor 3XX-1 Image Rotator 760-321260-000
KLA-Tencor SP1 TBI Ellipsoid Collector 393541
KLA-Tencor NGP, SP2 Mask Changer Assembly 0053106-002
KLA-Tencor AIT UV Laser Servo Detector 0099586-001 Used
KLA-Tencor Programmable Assembly 20009243A
KLA-Tencor F5 Flipper Actuator 52-0837
KLA-Tencor M1 3XX-I Active Mirror 760-321700-001
KLA Tencor 250864
KLA Tencor Extender Card 710-711345-00
KLA TENCOR AUTOFOCUS COLLIMATING LENS 2135/ 2132 LOADER
KLA-Tencor CRS1010 0031469-000 CRS SYSTEMS COMPUTER
KLA Tencor PZT controller 710-404582-00
Daihen KLA-Tencor HRP-340 Auto Tune Box CMC-10
KLA-Tencor 3XX-I Refl. Light Detect.760-321399-000 Used
KLA-Tencor SLX UCO, COL Assembly 760-333305-000 Used
KLA-Tencor Comet AMS Low Mag 0104920-003 Refurbished
KLA-Tencor 3XX-Blue Cas Replacement 780-372161-000 Used
KLA-Tencor Housekeeping Control 0075164-002 working
KLA-Tencor CRS1010 SDP Frame Grabber PCB 000483
KLA-Tencor HRP-340 Techsol Filter Unit 009-99FFU
KLA-Tencor SLX Reflected Light Assy 760-333022-000 Used
KLA-Tencor 5200 Dual Aperture Assy 720-470028-00 Used
KLA-Tencor Mark II Right Top Plate 740-680567-000
KLA-Tencor SM300 Monochromator 58-0834
KLA-Tencor Nikon Box Door Opener 750-059211-001
KLA-Tencor Dalton TDI Inspection Camera 750-061019-00
KLA-Tencor MGF2 Analyzer Assembly 0045755-000
KLA TENCOR 220V 37A BLOWER SINGLE PHASE 60HZ
KLA Tencor assy M1/M2 SERVO SP1 UV
KLA-Tencor 760-031790-00 Detector unit ,
KLA-TENCOR SFLEX2 MOTHER BOARD ASSY W/DAUGHTER BOARD ,
KLA Tencor 2131 2132 2552 Defect Wafer Inspection Sys
KLA-Tencor Surfscan 6200 Wafer Surface Analysis System
KLA TENCOR 2131 WAFER DEFECT INSPECTION SYSTEM
Wyko Veeco NT2000 Optical Profiler Zygo KLA Tencor
KLA-Tencor Prometrix FT-750 Film Thickness Measurement
KLA-Tencor Prometrix FT-750 Film Thickness Measurement
KLA-Tencor CRS 3000 300MM COMPLETE SYSTEM
KLA Tencor Ultrapointe Laser Imaging System LIS-1010
KLA Tencor Surfscan 4500
KLA-Tencor Prometrix FT-600 Film Thickness Measurement
Automated in-line film thickness mapping system w/ C2C
KLA-Tencor AIT 2 Upper Opto-Mech NNC 0024755-001
KLA-Tencor AIT 2 Rear Collector Assy. 0032129-000
KLA-Tencor AIT 2 Front Collector Assy. 0032131-001
KLA-Tencor AIT2 AIT3 Rear Collector Assy. 562556
KLA-Tencor ES4G Calibration Wafer Set
KLA-Tencor AIT 2 Measurement Head 0021726-001 working
KLA Tencor 2135 CMP Wafer Inspection Robot Loader Assy
KLA-Tencor AIT 2 Optics Module 0099610-000 untested
KLA-Tencor 2139 Software v5.3.49 Standard 0027325-000
KLA TENCOR DIGITAL DEFLECTION GENERATOR 701-603180-003
KLA - Tencor KIT , 190 ANALYZER FRU II 0145772-000
PRI KLA-Tencor Robot Track TRA035-LPS working
KLA-Tencor AIT1 JDS Uniphase Laser 2213-75TSLKTB
KLA-Tencor AIT 2 3 Front Collector Assy. 562610
KLA-Tencor AIT 1 JDS Uniphase Laser 2214-20SLUP
KLA-Tencor Alpha-Step 100 Profiler and Printer
KLA-Tencor Quantox 64000 Cooling Module working
KLA-Tencor Quantox 64000 Cooling Module working
KLA-Tencor AIT2 CPM Power Assembly 0218541-000
KLA-Tencor 2139 Sony DXC-9000 Camera 740-772299-000 Kit
KLA-Tencor 2135 Vertical Illuminator 760-663761-001
KLA-Tencor 2135 to 2138 Upgrade Kit 780-696341-000
KLA-Tencor 2138 Motorized 200mm Retrofit 780-666008-000
KLA - Tencor eS35 IA Board PN: 0134014-002
KLA-TENCOR 0111816-000 MCP10-DPRC CARD MERCURY COMPUTER
KLA-Tencor NEAT CRS1010 200mm Wafer Stage Controller
KLA-Tencor SLX MAC Box Assy. 770-336660-001 untested
KLA-Tencor AIT1 Leica Microscope Turret Assembly
KLA-Tencor AIT Lens Module 0034691-000 working
KLA-Tencor AIT2 Timing Generator Board 0053946-000 AA
KLA-Tencor AIT2 Wafer APS3.1 Board 0016302-000 AB
KLA-Tencor AIT1 Robot Distr. Assy. PCB 530352 Working
KLA-Tencor AIT1 Olympus Microscope Assembly Working
KLA Tencor Camera Timer 710-714647-00
KLA TENCOR IMAGE DATA STORAGE SYSTEM 710-612545-004/AA
KLA/Tencor/Tokyo Electron VIP Card Board TEL
KLA TENCOR SERVO AMPLIFIER 0061657-001
Aerotech KLA-Tencor Aerotech DR 500 Controller 510432
Aerotech KLA-Tencor AIT 2 DR 500 Controller 510432
KLA-Tencor AIT 2 Timing Generator Board 0053946-000
KLA-Tencor AIT 2 MMD Analog Board 565040 working
KLA-Tencor AIT 2 MMD Analog Board 565040 working
KLA-Tencor SLX RF Bench Assy. 740-336864-001 working
KLA-Tencor 301 I-Line RF Bench 740-323100-002 working
KLA-Tencor Quantox Light Board Module 64040 working
KLA-Tencor AIT 2 AOD GPIO Assy. 0017499-000 working
KLA-Tencor TMC STACIS 2000 Active Vibration Control
KLA-Tencor AIT2 Heat Exhaust Blower 570-0443
KLA-Tencor Cobra Shipping Filter Assy 0107339-000 Used