140CPU11302
正常运转的伺服电动机，只要失去控制电压，电机立即停止运转。当伺服电动机失去控制电压后，它处于单相运行状态，由于转子电阻大，定子中两个相反方向旋转的旋转磁场与转子作用所产生的两个转矩特性（T1－S1、T2－S2曲线）以及合成转矩特性（T－S曲线）
交流伺服电动机的输出功率一般是0.1-100W。当电源频率为50Hz，电压有36V、110V、220、380V；当电源频率为400Hz，电压有20V、26V、36V、115V等多种。
交流伺服电动机运行平稳、噪音小。但控制特性是非线性，并且由于转子电阻大，损耗大，效率低，因此与同容量直流伺服电动机相比，体积大、重量重，所以只适用于0.5-100W的小功率控制系统。
伺服电机与步进电机的性能比较
步进电机作为一种开环控制的系统，和现代数字控制技术有着本质的联系。在国内的数字控制系统中，步进电机的应用十分广泛。随着全数字式交流伺服系统的出现，交流伺服电机也越来越多地应用于数字控制系统中。为了适应数字控制的发展趋势，运动控制系统中大多采用步进电机或全数字式交流伺服电机作为执行电动机。虽然两者在控制方式上相似（脉冲串和方向信号），但在使用性能和应用场合上存在着较大的差异。现就二者的使用性能作一比较。
140CPU11302
KLA-Tencor Quantox Light Board Module 64040 working
KLA-Tencor AIT 2 AOD GPIO Assy. 0017499-000 working
KLA-Tencor TMC STACIS 2000 Active Vibration Control
KLA-Tencor AIT2 Heat Exhaust Blower 570-0443
KLA-Tencor Cobra Shipping Filter Assy 0107339-000 Used
KLA-Tencor Retrofit Optics Beamsplitter 0099602-001
KLA-Tencor SLX Objective Lens 760-334096-000 Untested
KLA-Tencor 395005 Tropel 14X CYL Telescope-1 AIT2
KLA-Tencor AIT UV COLL Side Polarizer 0024476-001
KLA-Tencor Lower Octopole/Wein Lens 780-14108-000
KLA-Tencor Lower Octopole/Wein Lens 780-14108-000
KLA-Tencor Cannon Box Magazine Assembly 740-060658-001
KLA Tencor 710-711754-00 Autofocus Board
KLA Tencor 710-711567-00 Communication interface II
KLA Tencor X/Y Interface 710-720011-01 Rev B6
KLA Tencor Sensor Buffer Board 710-710199-01
KLA Tencor Illumination Control 710-713250-01
KLA Tencor Cassette Controller Board 710-711879-01
KLA-Tencor SM300 (SpectraMap) Thin Film Mapping Tool
KLA-Tencor Wafer APS3 board AIT3 assy 546801 Rev: AC
COMDEL CPS SERIES RF GENERATOR KLA TENCOR POWER SUPPLY
Sony KLA-Tencor AIT 1 PowerHAD Camera DXC-950 CMA-D2
KLA TENCOR XYI ASSY 710-610391-000/AB SN P841002056 REV
KLA-Tencor AIT APS Tower/Center Block 0071149-001 Used
KLA-Tencor AIT3XP APS NIC Tower 0034693-001
KLA Tencor MMD analog AIT UV 0021488-005 Rev. AA
KLA Tencor MMD analog AIT UV 0052196-007
KLA Tencor MMD analog AIT UV 0021488-004 Rev AA
KLA-Tencor Lower Octopole/Wein Lens 780-14108-000 Used
KLA-Tencor Lower Octopole/Wein Lens 780-14108-000 Used
KLA-Tencor AIT 2 GPIO Board 386065 working
KLA-Tencor Lid Lift Leg Assy. 781-11759-000 working
KLA-Tencor CIP XP Column Extension Assy. 0110157-000
KLA-Tencor 486i Controller 0020839 Rev.AA working
KLA-Tencor High Voltage Control Module 52-1081
KLA-Tencor CRS2000 Olympus Microscope Turret BH3-5NRE-M
KLA-Tencor AIT 2 PSF Driver Board 556661 working
KLA-Tencor AIT 2 4-Channel Motor Control Board 363251
KLA-Tencor AIT 2 4-Channel Motor Control 261408 working
KLA-Tencor AIT 2 U500 Control Board 690D1470 working
KLA-Tencor Quantox High Voltage Control Module 52-1081
KLA-Tencor 8100 200mm XY Stage 780-10480-001 working
KLA-Tencor CRS1010 Camera Lens Filter 002001
KLA-Tencor CRS1010 Lens Filter Assy. 000056 working
KLA-Tencor 710-663106-001 Dual Stepper Driver 2
KLA-Tencor EDrawer Hardware RETR Kit 5.2 STD 2139
KLA-Tencor 2139 Flipper Autoloader Kit 780-689642-000
KLA-Tencor AIT2 Power Assembly LPM 390500
KLA-Tencor CRS1010 Camera Filter Assy. 000056 working
KLA-Tencor CRS1010 Lens Filter Assy. 002001 working
KLA-Tencor Glentek Electronics Analyzer 0045454-000
KLA-Tencor SLX RF Bench Assy. 740-336864-001 untested
KLA-Tencor Rotary Transfer Arm 720-07360-000
KLA-Tencor XP Objective Lens 0110155-000 Untested
KLA-Tencor port AIT3 Mask Changer 556190
KLA-Tencor Laser Mod 0124593-000
KLA-Tencor AIT UV Laser Servo Detector 0099586-001
KLA Tencor 710-710112-01 Mechanical Drive Board
KLA Tencor 710-710112-00 Mechanical Drive Board
KLA Tencor 710-710112-01 Mechanical Drive Board
KLA Tencor 710-710112-00 Mechanical Drive Board
KLA Tencor PN: 770-809195-000 Image Processor Board
KLA-Tencor GPIO assy: 0052412-001 Rev: AA
KLA Tencor robot DISTR AIT2 530352 P/N 0035531-000
KLA TENCOR FELL PROBE HEAD TYPE C 50-0002-03
KLA-Tencor Upper Housing Assy. 781-21332-000 working
KLA-Tencor Sony DXC-950P PowerHAD 3CCD Video Camera
KLA - Tencor GPIO ASSY Board 0052412-001 REV.AB
KLA-Tencor 395056 Tropel 2X mag conv lens
KLA Tencor P/N 770-809195-000
KLA-Tencor port NNC, AIT3, XP Polarizer 0044232-001
KLA-Tencor AIT 2 Illumination Board 556700 working
Sony KLA-Tencor AIT 2 PowerHAD Camera DXC-950 363170
KLA-Tencor Slide 12V Power Supply 740-658138-00 working
KLA-Tencor Quantox Head Control Module 64020 working
KLA-Tencor AIT 2 Servo Box Assy. 0039978-000 working
KLA-Tencor 740-693218-001 Extron ADA 4 300MX HV 2139
KLA-Tencor AIT1 Tropel 14X Anamorphic Telescope
KLA-Tencor AIT1 Ultrapointe Fast Z Controller PCB
KLA-Tencor SLX Chirp Cell 760-333918-000
KLA-Tencor 10KV Floodgun Assembly 720-23189-000
KLA-Tencor Spring Clamp Laser Servo Detect. 0124592-000
KLA-Tencor AIT/UV Laser Servo Detector 0099572-000
KLA-Tencor SLX Dog/Wag Assembly 760-333026-001
KLA-Tencor Left Cassette Nest, 5.2 740-694842-000
KLA - Tencor optics assembly 2xxx 0024939-000 Y-Mirror
KLA-Tencor PCB ASSY , INTF-DIAG , ES32
KLA-Tencor AIT 2 VAS Buffer Assy. 0034223-000 working
KLA-Tencor Aperture Heated Rod 781-23234-002 Used
KLA-Tencor Aperture Heated Rod 781-23234-001 Used
KLA-Tencor 3XX-I Reflected Light Detector760-321399-000
KLA-Tencor Laser Servo Detector 0062032-000 Refurbished