模块6DD1684-0FF0
模块6DD1684-0FF0
模块6DD1684-0FF0
模块6DD1684-0FF0
设计和功能
设计
S7-300 可以实现空间节省和模块式组态。除了模块，只需要一条 DIN 安装轨用于固定模块并把它们旋转到位。
这样就实现了坚固而且具有 EMC 兼容性的设计。
随用随建式的背板总线可以通过简单的插入附加的模块和总线连接器进行扩展。S7-300 系列丰富的产品既可以用于集中扩展，也可用于构建带有 ET 200M 的分布式结构；因此实现了经济的备件控制。
NOVELLUS 04-731602-02 SHIELD (CLEANED)
NOVELLUS 04-732004-01 TUBE,INSULATOR
NOVELLUS 04-732026-02 CABLE ASSY
NOVELLUS 04-733008-01 ARM, HOLDER
NOVELLUS 04-8120205-00 KIT,OEPD,DUAL,STD ALTUS
NOVELLUS 05-00007-00 PM,KIT,REACTOR CHAMBER
NOVELLUS 05-00009-00 KIT PM POU/SI FILLTER
NOVELLUS 05-00011-00 PM KIT GAS FEED-THRU
NOVELLUS 05-00023-00 PM KIT SEMI ANNUAL
NOVELLUS 05-00066-00 KIT PM REACT 200MM
NOVELLUS 05-00077-00 KIT PM ROBOT SEALS
NOVELLUS 05-00108-00 PM KIT, LOAD LOCK FILTERS C1-W
NOVELLUS 05-00110-00 PM KIT TEE SEALS C1W
NOVELLUS 05-05028-05 DC-DC CONVERTOR CYMER
NOVELLUS 05-10347-00 KIT PM N2FILTER1
NOVELLUS 05-10348-00 KIT, PM T-SEAL
NOVELLUS 05-124534-00 KIT O-RING SPEED CHAMBER
NOVELLUS 05-126872-00 KIT, CPEC, 200MM NOTCHED
NOVELLUS 05-14-067-00 V-BELT (POSITIONING)
NOVELLUS 05-3332 EXTENDER TOP COVER SAPPHIRE PL
NOVELLUS 05-50002-00 KIT, FILTER, 0.05 MICRON
NOVELLUS 05-50014-00 WATER FLOW S/W
NOVELLUS 05-50020-00 VACUUM BOX KIT
NOVELLUS 05-50033-00 KIT, CASSETTE HOOKS/SENSORS
NOVELLUS 05-50045-00 KIT ROTATION DRIVE
NOVELLUS 05-50069-00 KIT ROTATION DRIVE
NOVELLUS 06-0150 QTZ PIN
NOVELLUS 06-08140-00 CERAMIC RING
NOVELLUS 06-2605 KEY ISOLATION PLATE AL
NOVELLUS 06-2624 PLATE TOP UPPER
NOVELLUS 06-2625 PLATE BOTTOM
NOVELLUS 06-2640 SPOOL, QUARTZ
NOVELLUS 06-2654 ORIFICE,BOTTOM SAPPHIRE,ASTEX
NOVELLUS 06-2725 SHOWER HEAD,TUBE 1.83ID
NOVELLUS 06-2726 SHOWER HEAD,BOTTOM,SAPPH
NOVELLUS 062-00016-00 FLAG
NOVELLUS 07-20216-01 LEAD NUT ANTI-ROTATION
NOVELLUS 0700-700837 GASKET, PLATE COVER
NOVELLUS 0700-717454 DELRIN RING, .590 THK
NOVELLUS 0700-717577 SEAL, SLINGER SPIN ARM DELRIN
NOVELLUS 0700-727372 SEAL, SLINGER
NOVELLUS 0710-110107 SWITCH SELECTOR CONTROL UNIT(IDEC ABN1ZC1)
NOVELLUS 0710-120033 SWITCH SELECTOR CONTROL UNIT(IDEC TK1557 ASN33ZC6)
NOVELLUS 0710-717547 CLAMP, U BAND UP RING INTG PAD
NOVELLUS 0710-727158 CONNECTOR, SLURRY SHIELD RING
NOVELLUS 0710-738898 SHEET, ABRASIVE CND BLADDERLES
NOVELLUS 0720-111545 RING, CYLINDER WAFER BELL COUP
NOVELLUS 0720-700370 MOUNT, BULKHEAD PANEL
NOVELLUS 0720-717415 MOUNT, WAFER CARRIER
NOVELLUS 0720-718327 RING,STRIP BUMPER
NOVELLUS 0730-700047 BUSHING
NOVELLUS 0750-700181 CYLINDER,ROTATE
NOVELLUS 0750-700181 CYLINDER,ROTATE
NOVELLUS 0750-717491 CYLINDER,AIR,GAARD,ARM
NOVELLUS 0790-738891 BASE, PAD BLADDERLESS COND.
NOVELLUS 08-19891-026 SHIELD UV LARGE CLEAR
NOVELLUS 08-19891-027 WINDOW VIEWPORT QUARTZ T LARGE 5-7/8 X
NOVELLUS 08-21006-030 WINDOW VIEWPORT GLASS ASPR
NOVELLUS 08-21427-006 WINDOW QUARTZ EPD
NOVELLUS 08-22233-010 WINDOW VIEWPORT QUARTZ REAR (MCPAC 150)
NOVELLUS 08-22233-011 WINDOW UV SHIELD REAR MCPAC 150
NOVELLUS 08-22249-001 GATE VALVE
NOVELLUS 08-22434-001 WAFER MANIHOLDE ASSY
NOVELLUS 08-22434-051 COLLIMATOR OXIDE
NOVELLUS 08-22816-006 PLATE ADAPTER
NOVELLUS 08-24258-000 SUBSTRATE FAB FLAT BARE 150MM
NOVELLUS 08-24747-020 BELLOWS LIFTER R I E
NOVELLUS 08-30293-081 CLAMP CAP
NOVELLUS 08-34733-000 SUBSTRATE ASPR-CLL 125MM
NOVELLUS 10-00033-00 BACKFILL FILTER
NOVELLUS 10-00034-00 WELDMENT, GAS TUBE
NOVELLUS 10-00036-00 GAS LINE
NOVELLUS 10-00172-00 LINE TEFLON PIPE SIH4
NOVELLUS 10-00223-00 TUBE ASSY, .007 INJECTOR
NOVELLUS 10-00285-02 TUBE-LONG SHWR COOL
NOVELLUS 10-00346-02 TUBE ASSY
NOVELLUS 10-00360-00 DEGAS BY-PASS TUBE ASSY
NOVELLUS 10-00360-00 DEGAS BY-PASS TUBE ASSY
NOVELLUS 10-00376-00 ADAPTER, 1/8" VCR MALE TO LFC
NOVELLUS 10-00416-00 TUBE,BOTTOM
NOVELLUS 10-00417-00 TUBE,UPPER
NOVELLUS 10-00418-00 TUBE,LOWER
NOVELLUS 10-00419-00 TUBE,UPPER
NOVELLUS 10-00420-00 TUBE,LOWER
NOVELLUS 10-00421-00 TUBING, PURGE LINE, 1/16"
NOVELLUS 10-027392-00 Tube Divert for 8 channel box
NOVELLUS 10-029376-00 TUBE ASSY D MAN/CRYO BRK
NOVELLUS 10-042661-00 TUBE ASSY,MANIFOLD B&E
NOVELLUS 10-046842-00 C1W H MANI. LOWER
NOVELLUS 10-046843-00 C1W H MANI. UPPER
NOVELLUS 10-046844-00 C1W MOD MANI. UPPER
NOVELLUS 10-046845-00 C1W STO INLET MAN
NOVELLUS 10-046849-00 DD GASBOX STNO FILTER WELD
NOVELLUS 10-046851-00 DD GASBOX STN0 OUTLET WELD
NOVELLUS 10-046853-00 DD GASBOX STNO AR INLET WELD
NOVELLUS 10-046854-00 DD GASBOX STNO GAGE WELD
NOVELLUS 10-051632-00 TUBE ASSY,SHORT SPOOL,NUPRO
NOVELLUS 10-053060-00 TUBE ASSY PRESSURE CONTROL
NOVELLUS 1077642-71 RF GENERATOR CABLE
NOVELLUS 12-8872-054 ASSY,CBL,L&R WAFER SENSE
NOVELLUS 13-332016-00 NUT,WING,3/8-16
NOVELLUS 13-46870-01 CRESENT PIN CARRIAGE
NOVELLUS 13-8082-039 ROLLER, END CAP SUPPORT DUA
NOVELLUS 13-8092-337 SCREW ONTRAK LEAD W/NUT V3-2
NOVELLUS 13-8872-027 BLOCK,STOPPER,LOCATOR
NOVELLUS 1420-717038 RING,WEAR,PBT
NOVELLUS 1420-717052 RING, TOP CLAMP
NOVELLUS 15-00019-02 FLANGE, BLANKOFF, ALUM
NOVELLUS 15-00068-01 PADDLE ASSY, 150MM
NOVELLUS 15-00126-00 BRACKET
NOVELLUS 15-00311-00 NICKEL CAP NUT
NOVELLUS 15-00341-00 NICKEL HEX HEAD BOLT, 1/4-20 THREAD
NOVELLUS 15-00368-00 GENEVA DRIVE FLANGED SHAFT
NOVELLUS 15-00371-00 NICKEL 1/4-20 HEX NUT
NOVELLUS 15-00391-00 BUSHING, CERAMIC UPPER
NOVELLUS 15-00403-00 WTM UPPER ARM FIXTURE(TWO
NOVELLUS 15-00413-00 SPLINE ASSY THRUST WASHER
NOVELLUS 15-00416-00 SPACER, VACUUM (4IN)
NOVELLUS 15-00480-00 GENEVA DRIVER
NOVELLUS 15-00501-00 COUPLER OAR NUT V4-6
NOVELLUS 15-00511-00 SPACER ROTATION SHAFT
NOVELLUS 15-00539-00 SEAL,COVER
NOVELLUS 15-00554-31 SHIM, HEATER, 0.031" V-TYPE
NOVELLUS 15-00556-01 BRKT,DISCON
NOVELLUS 15-00578-00 SLEEVE, FLANGED, AC FEEDTHRU, CERAMIC
NOVELLUS 15-00600-00 SCREW 15-00600-00
NOVELLUS 15-00641-00 SHAFT, 3/8 ROT. DRIVE
NOVELLUS 15-00655-00 SINDLE ALIGN BLOCK
NOVELLUS 15-00655-00 SINDLE ALIGN BLOCK
NOVELLUS 15-00686-00 FEEDTHRU WASHERS
NOVELLUS 15-00688-00 WASHER, FEEDTHRU, 1/2" ID, ALUM
NOVELLUS 15-00702-00 FORK,TOP PLATE
NOVELLUS 15-00774-00 BKT,ADAPTOR-LEMO
NOVELLUS 15-00830-00 FITTING 90 DEGREE 3/8 TUBE
NOVELLUS 15-00835-00 PLATFORM - LIFT PIN WCVD
NOVELLUS 15-00921-00 COLLAR FITTING
NOVELLUS 15-00928-00 CLAMP OUTER RING
NOVELLUS 15-00931-00 PLATE, RING LIFT, EXCLUSION OPTION
NOVELLUS 15-00931-00 PLATE, RING LIFT, EXCLUSION OPTION
NOVELLUS 15-00935-00 SCREW-10-32X.50 LG N
NOVELLUS 15-00943-00 CLAMP, HEEL
NOVELLUS 15-00944-00 CLAMP, TOE
NOVELLUS 15-00975-00 LIFT PIN LOAD STATION
NOVELLUS 15-01022-00 PLATE R.F DIST, COPPER
NOVELLUS 15-01036-00 Bracket
NOVELLUS 15-01063-00 BRACKET, PADDLE, 200MM
NOVELLUS 15-01085-02 BRACKET,FRONT,RIGHT
NOVELLUS 15-01101-00 HUB, WAFER INDEXER 8"
NOVELLUS 15-01103-00 SHAFT,RING,LIFT,INNER
NOVELLUS 15-01136-00 BKT,ARM CASSETTE
NOVELLUS 15-01137-00 BLANK OFF, VERITY EP
NOVELLUS 15-01137-00 BLANK OFF, VERITY EP
NOVELLUS 15-01139-00 RING, WINDOW
NOVELLUS 15-01142-00 WINDOW, ROUND
NOVELLUS 15-01160-00 Bracket, WOPS Sensor
NOVELLUS 15-01163-00 BRACKET REAR CASSETTE V4-3
NOVELLUS 15-01167-00 BRACKET ARM/PADDLE V3-6
NOVELLUS 15-01169-00 CLAMP,TUBE-DUAL
NOVELLUS 15-01170-00 BRKT,DUAL
NOVELLUS 15-01175-00 BLADE REAR CASSETTE HOLDER
NOVELLUS 15-024198-00 CERAMIC RING
NOVELLUS 15-024611-00 PADDLE 200MM
NOVELLUS 15-024881-00 FORK END CAP
NOVELLUS 15-024881-00 FORK END CAP
NOVELLUS 15-024924-01 CERAMIC CLAMP
NOVELLUS 15-024924-02 CERAMIC CLAMP
NOVELLUS 15-027004-00 PLUG, COVER, HEATER, SCREW
NOVELLUS 15-028207-00 NUT, SEAL RETAINER
NOVELLUS 15-029071-00 ADAPTER XRING, LOCATOR
NOVELLUS 15-029506-00 Flange, Verity, Endpoint
NOVELLUS 15-029601-00 BRACKET MTG UPS BROOKS 5866
NOVELLUS 15-029856-00 EVAPORATOR BODY, CVD TIN
NOVELLUS 15-032577-02 PIN,SPEED ESC FR/DC
NOVELLUS 15-033198-00 ROD, CERAMIC, PEDESTAL
NOVELLUS 15-033385-00 RING DOME BASE
NOVELLUS 15-033755-00 TOOL ALIGN INLIGNER PADDLE
NOVELLUS 15-034084-02 SUPPORT, HOIST, UPPER
NOVELLUS 15-034104-00 COOL STATION ASSEMBLY
NOVELLUS 15-034532-01 WINDOW, PANEL
NOVELLUS 15-034848-00 HUB LOWER INDEXER
NOVELLUS 15-034849-00 RETAINER, SEAL
NOVELLUS 15-034852-00 SPACER, BUSHING
NOVELLUS 15-034964-00 BEARING BROOKS ROBOT WRIST
NOVELLUS 15-038324-00 SHIELD PESTAL LEAD WIRE
NOVELLUS 15-041085-00 RING,GUARD,200MM,FLATTED
NOVELLUS 15-041335-00 TOOL,ALIGN, 200MM
NOVELLUS 15-041335-00 TOOL,ALIGN, 200MM
NOVELLUS 15-042148-00 PLENUM, PURGE, TOP
NOVELLUS 15-042159-00 TUBE, CERAMIC
NOVELLUS 15-042166-00 SPINDLE WHEEL BOTTOM PLATE
NOVELLUS 15-042167-00 SPINDLE WHEEL TOP PLATE
NOVELLUS 15-042256-00 FINGER, FORK, CERAMIC, LOW CONTACT
NOVELLUS 15-042268-00 WINDOW, ETCH RESIST, QUARTZ
NOVELLUS 15-042271-00 PLEXI GUARD
NOVELLUS 15-045534-00 PLUG HOLE RF DIST BOX
NOVELLUS 15-046056-00 BOLT 1/4-20X1.0
NOVELLUS 15-046123-00 CLEVIS, HOIST ACTUATOR
NOVELLUS 15-046857-00 DD GBOX STN0 MFC MNT PLATE
NOVELLUS 15-046858-00 DD GBOX STN0 MFC MNT BRKT
NOVELLUS 15-051711-25 TUBE,INJECTOR,2.500
NOVELLUS 15-052614-00 TONG, RINGLIFT 200MM
NOVELLUS 15-054595-00 SCREW 1/4 28 GUIDE CERAMIC
NOVELLUS 15-055720-00 SPACER BUSHING
NOVELLUS 15-101294-00 SPING, CENTER
NOVELLUS 15-10324-00 BUTTON,PIN (CERAMIC)
NOVELLUS 15-10379-00 BLANKOFF,SENSOR
NOVELLUS 15-10483-00 BRACKET
NOVELLUS 15-10489-00 CLAMP, CHAMBER VIEWPORT
NOVELLUS 15-10524-00 TIC, BLOCK TRANSFER MODULE
NOVELLUS 15-10628-00 RING, EXCLUSION, PLATE
NOVELLUS 15-10667-00 RING, EXCLUSION
NOVELLUS 15-108174-00 CUP, SCREW COVER
NOVELLUS 15-10837-00 COVER, VAT, VIEWPORT
NOVELLUS 15-10837-00 COVER, VAT, VIEWPORT
NOVELLUS 15-11030-00 CLAMP,RING,FEEDTHRU
NOVELLUS 15-11031-00 FEEDTHRU,TOP
NOVELLUS 15-110526-00 PIN, POWER RLVD
NOVELLUS 15-11109-00 CLAMP,RING,INNER
NOVELLUS 15-11135-00 SENSOR WINDOW MAP
NOVELLUS 15-11350-00 FLANGE, MESC, INTERFACE, CVD-D
NOVELLUS 15-11616-03 TOOL WAFER CNTRNG 200MM .38DIA
NOVELLUS 15-11658-00 SHAFT,INSULATED,EXTENDER
NOVELLUS 15-118451-00 AERA MFC BRACKET (CLEAR AODINE)
NOVELLUS 15-119059-00 Bolt 1/4-20 1/4 Nickel
NOVELLUS 15-124538-00 LOUVER SCREEN BRACKET
NOVELLUS 15-132969-00 PIN,.250 x.95,#8-32
NOVELLUS 15-135655-01 END EFFECTOR R L/LK, VCTR
NOVELLUS 15-138402-00 MOER RING 2.75 MM
NOVELLUS 15-154040-00 CU/P.040-.065(PRAXAIR)
NOVELLUS 15-154040-00 CU/P.040-.065(PRAXAIR)
NOVELLUS 15-2673 DRIVE,BELT,ROTATOR,ERGO
NOVELLUS 15355-01 ADAPTER-TRANSDUCER QUARTZ IPC
NOVELLUS 15651-01 CABLE, FAN
NOVELLUS 15884-02 PWA EOP DETECTOR
NOVELLUS 15884-02 PWA EOP DETECTOR
NOVELLUS 16-00089-00 PLATE, GAS DISTRIBUTION, TOP
NOVELLUS 16-00092-00 STRAP HEATER FEEDTHRU
NOVELLUS 16-00197-00 FLOPPY MOUNTING BRACKET
NOVELLUS 16-00198-00 FLOPPY MOUNTING BRACKET
NOVELLUS 16-024771-00 FLANGE EXHAUST
NOVELLUS 16-029844-00 DISTRIBUTOR ASSY ALSO w/ 16-029846-00 & 16-029845-00
NOVELLUS 16-029846-00 DISTRIBUTOR BOTTOM
NOVELLUS 16-033105-00 PLATE, SEAL PEDESTAL
NOVELLUS 16-033105-00 PLATE, SEAL PEDESTAL
NOVELLUS 16-034002-00 HONEYCOMB DISK
NOVELLUS 16-034459-00 SHELF IOC SUPPORT
NOVELLUS 16-041993-00 SPACER 4 VACUUM
NOVELLUS 16-046933-00 BRKT,STN
NOVELLUS 16-049511-00 SHOWERHEAD
NOVELLUS 16-049525-00 SHOWERHEAD
NOVELLUS 16-10253-00 SHOWERHEAD
NOVELLUS 16-139965-00 WELDMENT,DIFFUSER,200mm (HIGH ACID)
NOVELLUS 16-148547-00 CHUCK,PEM,EBR,200MM
NOVELLUS 16-159097-00 CHUCK,PEM,200MM,HRU
NOVELLUS 16-167627-00 FILTER
NOVELLUS 16065-01 HARNESS ASSY, LIFT SENSOR
NOVELLUS 162-41-012A ARM BLOCK
NOVELLUS 16531-01 ROD DIFFUSER,QTZ LAMP
NOVELLUS 16875-01 CABLE,ASSY J4 EXH INTLK
NOVELLUS 16877-01 CABLE,ASSY SIG-REM DISPLAY
NOVELLUS 17-00091-00 RETAINER BRACKET
NOVELLUS 17-00094-00 STRAP RF
NOVELLUS 17-00106-00 COVER LIFT MOTOR
NOVELLUS 17-00194-00 BRACKETS
NOVELLUS 17-00286-00 FLAT CABLE
NOVELLUS 17-00316-00 CABLE, BRACKET
NOVELLUS 17-024406-00 BRKT.SWITCH PLATFORM
NOVELLUS 17-034429-01 PANEL, SIDE
NOVELLUS 17-034430-01 PANEL, SIDE
NOVELLUS 17-045011-00 FLAG,CASSETTE
NOVELLUS 17-050152-00 BOX
NOVELLUS 17-103642-00 Heater Isolation Box
NOVELLUS 17-10450-00 BRACKET SWITCH PANEL INTERLOCK
NOVELLUS 17-10480-00 FLAG,CASS
NOVELLUS 17-10515-00 STRAP,SHUNT,CAPACITOR
NOVELLUS 17-112594-00 RTNR KEYBOARD TRAY DLCM-S
NOVELLUS 17-112873-00 CU,CONTACT, CONE UP, FLAT
NOVELLUS 17-11496-01 COVER
NOVELLUS 17-118866-00 SCREEN RF SHIELD ETCHED OEP
NOVELLUS 17-145723-00 BRACKET, POWER SUPPLY
NOVELLUS 17-16938-02 CONTROL EXHAUST KIT
NOVELLUS 17-267445-00 MOUNTING BRACKET
NOVELLUS 17-275970-00 BRACKET MOUNTING PWR SUPPLY
NOVELLUS 17-276299-00 24 V DC POWER SUPPLY MOUNT
NOVELLUS 17-53971-01 D.C. SERVO MOTOR
NOVELLUS 17-68876-01 PCB,SECSI/11 ARTIC
NOVELLUS 17559-01 CABLE MAGNETRON HIGH VOLTAGE
NOVELLUS 17818-02 REFLECTOR TRAY BULB
NOVELLUS 18-010968 FLIPPER,ASSY,INTERGRATED
NOVELLUS 18-0871-07 SCREW,8-32X5/8,LG,SHC,SST (PACK OF 10)
NOVELLUS 19-00017-00 GUIDE BAFFLE
NOVELLUS 19-00034-00 GEAR INNER SHAFT
NOVELLUS 19-00058-00 Pulley, Timing
NOVELLUS 19-00060-00 BEARING
NOVELLUS 19-00071-00 TUBE, FITTING INS FEMALE 1/16
NOVELLUS 19-00111-00 ONE ARM ROBOT LEADSCREW (W/NUT)
NOVELLUS 19-00121-00 CAPACITER, RF DIS